Gateinduced drainleakage gidl programming method for. The gidl is more in case of singlediffused drain as compared to doublediffused drain. However, gateinduced drain leakage gidl is a major concern at low power technology nodes because of bandtoband and trapassisted tunneling tat due to reduced bandgap. There are still other leakage components, like gate induced drain leakage gidl and punchthrough current, however those ones. For mainmode bits, leakage current can be attributed to junction thermalgeneration leakage current. The incorporation of draininduced barrier lowering dibl, gate induced drain lowering gidl and body effect m on the subthreshold leakage isub wasinvestigated in detail. Simulated stress distributions along channel length direction of both a and bdevice. Gate induced drain leakage an overview sciencedirect topics. A large component of offstate leakage current is gate induced drain leakage gidl current, caused by bandto band tunneling in the drain region underneath the gate when there is a large gate to drain bias, there can be sufficient energyband.
Gateinduced drain leakage gidl is another significant leakage mechanism, resulting due to the depletion at the drain surface below the gatedrain overlap region. The effects of shallow trench isolation sti induced mechanical strain on gate induced drain leakage gidl current in hfbased and sion ntype metal oxide semiconductor field effect transistors. Trapassisted tunneling effects on gate induced drain leakage in silicongermanium channel pfet conference paper pdf available september 2015 with 188 reads how we measure reads. In an nmos transistor, when the gate is biased to form accumulat ion layer in the silicon surface under the gate, the silicon surface has almost the same potential as. When the drain is connected to a positive bias and. Gate induced drain leakage gidl is another significant leakage mechanism, resulting due to the depletion at the drain surface below the gate drain overlap region. Drain induced barrier lowering dibl qualitative 6 in shortl g mosfet. One of the leakage mechanisms which contribute significantly to power dissipation is the gate induced drain leakage gidl.
Hote, gate induced drain leakage gidl, on and offstate currents. The drain current offset distorts the drain current in the linear region of the transistor performance curve, making it. Gate induced drain leakage gidl gate induced drain leakage gidl is caused by high field effect in the drain junction of mos transistors. Offstate leakage induced by bandtoband tunneling and. In an nmos transistor, when the gate is biased to form accumulation layer in the silicon surface under the gate, the silicon surface has almost the same potential as the ptype substrate, and the surface acts like a p region more heavily. The reasons are i the subthreshold conduction increases exponentially due to the threshold voltage reduction. Contribution of gate induced drain leakage to overall leakage and. It was found that gidl current dominates the junction leakage even at zero gate bias and nominal drain bias of 1. For tailmode bits, it is found for the first time that gate induced drain leakage gidl current has a dominant impact. This is a measure of gate leakage of a logic gate during its steady state.
Accurate leakage current models for mosfet nanoscale devices. The impact of the gate induced drain leakage and impact ionization currents on hysteresis of pd fb soi circuits is examined, and a physical understanding is provided. Citeseerx document details isaac councill, lee giles, pradeep teregowda. A study on hci induced gate leakage current model used for. Under the application of strong vertical and longitudinal fields, the drain region in the overlap region may go into deep depletion as the vertical field tends to invert the region and the longitudinal field sweeps the inverted carriers holes for n channel devices.
The tunnelingbased leakage currents caused where the gate overlaps the drain is referred to as the gate induced drain leakage gidl. Asymmetric gateinduced drain leakage and body leakage in. The gidl current depends only upon conditions in the immediate gate to drain. Investigation of gateinduced drain leakage gidl current. The polarity of the sourcedrain doping is independent of the polarity of the central or outer gate conductors. This current is found to be due to the bandtoband tunneling occurring in the deepdepletion layer in the gate to drain overlap region. Here, we have studied the gidl dependence on temperature as well as drain and substrate bias. Praveen meduri ee478 presentation on gate induced drain leakage current. Contribution of gate induced drain leakage to overall leakage. Silicongermanium sige channel pmosfet is considered as a replacement for silicon channel device for 32nm node and beyond, because of its lower threshold voltage and higher channel mobility. The bandtoband tunneling bbt1012 and trapassisted tunneling15 are the wellknown mechanisms.
In this paper we propose a new model for leakage mechanism in tailmode bits of dram data retention characteristics. Gateinduced drain leakage gidl is caused by high field effect in the drain junction of. Improving the gateinduced drain leakage and onstate. Those three major leakage current mechanisms are illustrated in fig. Electrothermally induced parasitic gate leakage etipgl or gl is an environment and materials induced failure mechanism that adversely affects the performance and reliability of an integrated circuit. Gidl is a phenomenon which occurs when a high voltage is applied to the drain with the gate grounded, as a result a deepdepletion region is formed underneath the gate to drain overlap region shown in figure. Significant gateinduced drain leakage current can be detected in thin gate oxide mosfets at drain voltages much lower than the junction breakdown voltage. Assenmacher, infineon 2003 isub subthreshold leakage from source ig gate leakage direct tunneling igidlgate induced drain leakage gidl ij junction reversebias leakage relative contributions of offstate leakage but magnitude of total leakage. Gate induced drain leakage gidl current is investigated in single gate sg ultrathin body field effect transistor fet, symmetrical double gate dg finfet, and asymmetrical dg metal oxide semiconductor field effect transistor mosfet devices. The impact of gateinduced drain leakage current on mosfet. This diagram, based on a comprehensive paper by roy et al. Investigation of gateinduced drain leakage gidl current in. Gl is a trappedcharge phenomenon found in plastic encapsulated bipolari. Device design considerations for minimizing the gateinduced drain leakage current are discussed.
Gate induced drain current gidl is a band to band tunneling phenomenon and an offstate leakage current mechanism. Gate induced drainleakage gidl programming method for softprogrammingfree operation in uni. State independent average gate leakage current of a logic gate 4 1. Lower sige bandgap makes gate induced drain leakage gidl important for low leakage, high threshold voltage device designs. Hot carrier effect on gateinduced drain leakage current in. Gidl sets an upper limit on the vlsi mosfet scaling and may even. Gate bias induced leakage current and drain current offset limit device performance in poly 3hexylthiophene p3ht organic thin film transistors otfts. In a classic planar fieldeffect transistor with a long channel, the bottleneck in channel formation occurs far enough from the drain contact that it is electrostatically shielded from the drain by the combination of the. This paper investigates the effect of the asymmetric source and drain geometries of surround gate vertical mosfets on the drain leakage currents in the offstate region of operation.
Kobayashi faculty of science and technology, gunma university d33 asicon chengdu 36 november 2015. Hu, stress induced leakage current due to charging damage. Leakage current reduction is of primary importance as the technology scaling trends continue towards deep submicrometer regime. Impact of gate induced drain leakage on overall leakage of.
Contribution of gate induced drain leakage to overall. Significant gate induced drain leakage current can be detected in thin gate oxide mosfets at drain voltages much lower than the junction breakdown voltage. The use of silicongermanium as a channel material in highk metal gate first pfet technologies of 32nm and beyond has been widely accepted for high performance and low power applications. Large vds large depletion layer around drain part of channel surface already depleted lowered barrier vt reduced increased leakage current. Drain induced barrier lowering dibl is a shortchannel effect in mosfets referring originally to a reduction of threshold voltage of the transistor at higher drain voltages. Hu, modern semiconductor devices for integrated circuits, figure 75 long channel short channel y x. Pdf enhanced gate induced drain leakage current in hfo2. Impact of gateinduced drain leakage current on the tail. Electric field, ez, gate induced drain leakage current, igidl, and surface potential have been modeled. Sources and reduction for transistors, gates, memories and. When the gate is biased to form an accumulation layer at the silicon surface, the silicon surface under the gate has almost same potential as the ptype substrate. For nanometer devices, leakage current is dominated by subthreshold leakage, gate oxide tunneling leakage and reversebias pnjunction leakage. It is found that the gidl method effectively suppresses soft programming without sacri.
One leakage current mechanism that has been mostly neglected until recently is called the gate induced drain leakage gidl. Gidl is induced by bandtoband tunneling effect in strong accumulation mode and generated in the gatetodrain overlap region. Us6097070a mosfet structure and process for low gate. The impact of gateinduced drain leakage current on. Gate oxide thickness and gate polysi etching condition dependence, 1998 3rd international symposium on plasma processinduced damage, pp. Among the problems caused by these effects is the bandtoband tunnelling bbt of hot carriers in the gate to drain overlap region which is the source of the gate induced drain leakage current. Gate induced drain leakage, a leakage mechanism in mosfets due to large field effect in the drain junction.
Dec 10, 2016 praveen meduri ee478 presentation on gate induced drain leakage current. Hu, stressinduced leakage current due to charging damage. However, gateinduced drain leakage gidl is a major concern at low power technology nodes because of bandtoband and trapassisted tunneling tat due. Mosfet structure and process for low gate induced drain leakage gild download pdf. Hotelectroninduced device degradation during gateinduced. Gate induced drain leakage gate induced drain leakage gidl occurs due to band to band tunneling at gate drain overlap region under the strong electric field. Gidl current is one of the major drain leakage components and is generated in the overlapped region of the gate and the drain. Accurate leakage current models for mosfet nanoscale. Model of random telegraph noise in gate induced drain leakage current of highk gate dielectric metaloxidesemiconductor fieldeffect transistors appl. A study on hci induced gate leakage current model used for reliability simulations in 90nm nmosfets nobukazu tsukiji h.
Us7359271b2 gate induced drain leakage current reduction. For example, one circuit component that is the building block of digital logic functions, including data storage memory circuits is the socalled field effect transistor. Impact of gateinduceddrainleakage current modeling on. Major contributors to the gate leakage current are the gate oxide tunneling and the injection of hot carrier from substrate to gate oxide. Generic interface definition language, an extension to corba idl. Cristoloveanua a imeplahc, inpgrenoble, minatec, 3 parvis louis neel, bp 257, 38016 grenoble, france. The polarity of the source drain doping is independent of the polarity of the central or outer gate conductors. Gate induced drain leakage current in 45nm cmos technology. The fin shape can be changed by varying the top width of the fin. In a classic planar fieldeffect transistor with a long channel, the bottleneck in channel formation occurs far enough from the drain contact that it is.
In this paper, an analytical paradigm for the gate induced drain leakage gidl for shallow extension engineered dual metal surrounding gate seedmsg mosfet using superposition technique with appropriate boundary conditions is proposed. Revisited approach for the characterization of gate induced. This paper explores the various transistor intrinsic leakage mechanisms including the weak inversion, the drain induced barrier lowering, the gate induced drain leakage, and the gate oxide tunneling. Measurements of gateinduced drain leakage gidl and. Gate induced drain leakage gidl improvement for millisecond flash anneal mfla in dram application. The tunnelingbased leakage currents caused where the gate overlaps the drain is referred to as the gateinduced drain leakage gidl. This paper underlines a closed forms of mosfet transistorsleakage current mechanisms inthe sub 100nmparadigm. Measured reductions in gidl current for sg and dg thinbody devices are reported for the first time. Cristoloveanua a imeplahc, inpgrenoble, minatec, 3 parvis louis neel, bp 257, 38016 grenoble, france bcealeti, minatec, 17 avenue des martyrs, 38054 grenoble cedex 9, france cschool of engineering, brown university, providence, ri 02912, usa. Measured silicon data from 90nm and 65nm pd soi technologies indicate that both components dominate in the substrate currents at zero gate voltage and nonzero drain voltages. Gate induced drain leakage an overview sciencedirect. Implementation and characterization of gate induced drain leakage currentbased multiplexed sinw biosensor jieun lee 1, jung han lee2, mihee uhm1, won hee lee, seonwook hwang1, bong sik choi1, byunggook park2, dong myong kim1, and dae hwan kim1, 1school of electrical engineering, kookmin university, seongbuk gu, seoul, 6 702, korea 2school of electrical engineering and computer. One of such schemes is shown in figure 5, where the body voltage sweeps with all other terminals grounded and the.
Pdf gateinduced drain leakage gidl improvement for. Pdf investigation of gateinduced drain leakage gidl current. Modeling of shallow extension engineered dual metal. Analysis of gate induced drain leakage mechanisms in silicongermanium channel pfet article pdf available in ieee transactions on electron devices 615. The leakage in the drain region is a crucial issue for scaling of the mosfet towards the deep submicron regime. The resulting drain to body current is called gate induced drain leakage gidl current. Implementation and characterization of gateinduced drain. The underlying assumptions of the previously proposed extraction methods are exposed and their ability to capture bandtotrap mechanisms is discussed. Hot carrier effect on gateinduced drain leakage current. Index termsdisturbance, finfet, gateinduced drain leak. However, gateinduced drain leakage components and mechanisms are dominant compared to all the other leakage mechanisms in high threshold voltage devices.
Hot carrier effect on gate induced drain leakage current in highkmetal gate nchannel metaloxidesemiconductor fieldeffect transistors chihhao dai,1 tingchang chang,1,2,3,a annkuo chu,1 yuanjui kuo,1 szuhan ho,4 tienyu hsieh,2 wenhung lo,2 chingen chen,4 joumiao shih,2 wanlin chung,2 baishan dai,2 huamao chen,2 guangrui xia,5 osbert cheng,6 and cheng tung huang6. Effect of fin shape on gidl and subthreshold leakage currents. Impact of gate induced drain leakage and impact ionization. Gate induced drain leakage gidl is caused by high field effect in the drain junction of mos transistors.
Impact of gate induced drain leakage on overall leakage of submicrometer cmos vlsi circuits oleg semenov, andrzej pradzynski, member, ieee, and manoj sachdev, senior member, ieee abstract in this paper, the impact of gate induced drain leakage gidl on the overall leakage of submicrometer vlsi circuits is studied. Us7359271b2 gate induced drain leakage current reduction by. Gate induced drain leakage gidl gateinduced drain leakage gidl is caused by high field effect in the drain junction of mos transistors. The root cause is electric field enhancement caused by. In an nmos transistor, when the gate is biased to form. In this letter, the effect of prehaloldd ge preamorphization. Gidl current is a result of depletion at drain surface below the gate drain overlap region. Gateinduced drainleakage gidl programming method for soft.
Since the channel must be depleted of charge before inversion takes place, any help on depletion process will reduce vt. Electrical field increases with the decreasing the depletion layer at the surface. Gate induced leakage and drain current offset in organic. Draininduced barrier lowering dibl is a shortchannel effect in mosfets referring originally to a reduction of threshold voltage of the transistor at higher drain voltages. This paper investigates the effect of the asymmetric source and drain geometries of surroundgate vertical mosfets on the drain leakage currents in the offstate region of operation. Finfets have emerged as the solution to short channel effects at the 22nm technology node and beyond. Pdf analysis of gateinduced drain leakage mechanisms in. The charges trapping in the gate oxide and the defects at the sisio 2 interface have also undesirable effects on the degradation and ageing of mosfet. Impact of interface traps on gateinduced drain leakage. In this letter, the effect of prehaloldd ge preamorphization implant pai on gidl and performance is investigated using experimental data and simulations. Here, the effect of fin shape on the leakage currents like gate induced drain leakage and subthreshold leakage is evaluated. Analysis of gateinduced drain leakage mechanisms in silicongermanium channel pfet article pdf available in ieee transactions on electron devices 615. Gate induce drain leakage gidl is another signi cant leakage mechanism, resulting from the depletion at the drain surface below the gate drain overlap region.
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